7.16. Shallow trench isolation
Shallowtrenchisolation(STI),alsoknownasboxisolationtechnique,isanintegratedcircuitfeaturewhichpreventselectriccurrentleakagebetween ...,Abstract:Inthispaper,theeffectofSiNpull-backprocessforshallowtrenchisolation(STI)isinvestigatedbymeasuringDRAM...。參考影片的文章的如下: